| 摘要 |
<p>A method of treating a flon-113 containing waste gas is disclosed, which comprises contacting at atmospheric pressure or under pressurized conditions a flon-113 containing waste gas with at least one absorber selected from the group consisting of saturated mineral oils, alkyl diphenyl ether based oils, silicone oils, trifluorochloroethylene based oils, and perfluoropolyether based oils, having a vapor pressure of not higher than 7.6 X 10<-><2> mmHg at 25 DEG C and a viscosity of not higher than 500 cp at 25 DEG C, to remove flon-113 contained in the waste gas by absorbing, and depressurizing the absorber having absorbed therein flon-113 to recover flon-113. Also, an apparatus for treating a flon-113 containing waste gas is disclosed, which comprises an absorption tower in which a flon-113 containing waste gas is contacted with the absorber, a stripping tower communicated to the absorption tower, in which the absorber having absorbed therein flon-113 from the absorption tower is retained under reduced pressure to strip flon-113, a dry vacuum pump for retaining the inside of the stripping tower under reduced pressure, a condenser for cooling and condensing a discharge gas from the dry vacuum pump to recover flon-113, and a means for recycling the absorber after stripping out flon-113 to the absorption tower. The apparatus may further comprise an oil-free compressor for compressing a flon-113 containing waste gas, a degasing tower in which the absorber having absorbed therein flon-113 is retained under reduced pressure to degas air and a small amount of flon-113 both dissolved in the absorber, a vacuum pump for retaining the inside of the degasing tower under reduced pressure, a piping for introducing a discharge gas from the vacuum pump into an absorption site of the compressor where the flon-113 containing waste gas is absorbed, and a heater for heating the degased absorber in the degasing tower.</p> |
