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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01170028(A)
申请公布日期
1989.07.05
申请号
JP19870327083
申请日期
1987.12.25
申请人
HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD
发明人
KANNO TOSHIO;NAGAOKA KOJI;TSUKUI SEIICHIRO;WAKASHIMA YOSHIAKI
分类号
H01L21/60;H05K1/18;H05K3/34
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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