DRY ETCHING DEVICE,申请号JP19870326939-传众专利搜索

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发明名称	DRY ETCHING DEVICE
摘要
申请公布号	JPH01170025(A)	申请公布日期	1989.07.05
申请号	JP19870326939	申请日期	1987.12.25
申请人	HITACHI LTD	发明人	OHARA KAZUHIRO;OTSUBO TORU
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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