MASS ANALYZER FOR PLASMA ION SOURCE,申请号JP19870327135-传众专利搜索

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发明名称	MASS ANALYZER FOR PLASMA ION SOURCE
摘要
申请公布号	JPH01169844(A)	申请公布日期	1989.07.05
申请号	JP19870327135	申请日期	1987.12.25
申请人	HITACHI LTD	发明人	OKAMOTO YUKIO;YASUDA MAKOTO;MURAYAMA SEIICHI;KOGA TADATAKA
分类号	H01J27/02;H01J37/08	主分类号	H01J27/02
代理机构		代理人
主权项
地址

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