A method of making planar oxygen pumping devices.

摘要

This invention is directed to the fabrication of planar oxygen pumping devices by a batch technique. The method comprises providing a uniform layer (12) of a ceramic material in contact with a first surface of a layer (60) of etchable material, forming grooves in the second surface of the etchable material and leaving at least a set of substantially identical, parallel and rectangular solid projecting strips of etchable material, depositing a layer (16) of first electrode with said projeciting strip and a portion of groove bottom surface adjacent said projecting strip, depositing a layer of an oxygen-ion conductive electrolyte material (14) over the first electrode (16) any exposed etchable material and the ceramic material and depositing a layer (18) of second electrode over at least or portionly said oxygen-ion conductive electrolyte material (14). The layered article is cut to produce a plurality of individual structures of said devices.