CHARGED PARTICLE BEAM DEVICE,申请号JP19870329325-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号	JPH01169860(A)	申请公布日期	1989.07.05
申请号	JP19870329325	申请日期	1987.12.25
申请人	JEOL LTD	发明人	SAWARAGI HIROSHI
分类号	H01J37/244;H01J37/305;H01J37/317	主分类号	H01J37/244
代理机构		代理人
主权项
地址

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