发明名称 |
Automatic alignment apparatus having low and high resolution optics for coarse and fine adjusting |
摘要 |
An optico-mechanical alignment apparatus having at least two optical paths, one with low resolution and one with high resolution providing an image to video image generator. The image forms a first data set that is compared to a second data set representative of the preferred alignment of an object to be aligned by a comparison means that can automatically move a stage mounting the object to be aligned in the X, Y and Z directions and rotate it in the X Y plane. The object is coarsely aligned with the low resolution optics and then finely aligned with the high resolution optics.
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申请公布号 |
US4845373(A) |
申请公布日期 |
1989.07.04 |
申请号 |
US19860899992 |
申请日期 |
1986.08.25 |
申请人 |
KLA INSTRUMENTS CORPORATION |
发明人 |
JAMIESON, JOHN;HSU, MAY M. |
分类号 |
H01L21/68 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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