摘要 |
<p>PURPOSE: To obtain an accurate measurement value by providing a radioactive ray source for generating the directional beams of optical energy and a cell in nearly cylindrical shape for housing a sample gas for measuring the concentration in a mixture by analyzing at least one constituent. CONSTITUTION: Light energy is directed so that it passes through a cell 28 where a sample gas mixture has been filled in advance from a radioactive ray source 24 by a reflector 12. Light energy emitted from the cell 28 through a window 32 is applied to the side of a substrate 46 including a masking layer 58 and filters 50-56. In the masking layer 58, light energy can reach only active regions 152-138 of a row of thermocouples 48. The filters 50-56 pass only the selected wavelength of the light energy to the active regions 132-138. Each of thermocouples 68-74 generates a voltage related to the amount of light energy detected by each active region.</p> |