| 摘要 |
PURPOSE:To simultaneously surface faces and backs of a plurality of workpieces by providing gaps among a plurality of lines of ultraviolet ray lamps and inserting the workpiece among those gaps. CONSTITUTION:Two quartz plates 2, 2 ' are arranged, forming a gap, between adjacent lines of a plurality of lines of low pressure mercury lamps 1. A wafer 3 is inserted into each gap at the center of the same, and oxygen gas such as ozone is directed to flow into each gap through a nozzle 4. Hereby, the ozone produces non-ionized excited oxygen atom by irradiation of ultraviolet rays from the lamps 1, which atom reacts with organic material such as a resist disposed on the wafer to volatilize the material and hence remove the material. Thus, faces and backs of a plurality of workpieces are simultaneously surfaced for high efficiency of the processing. |
