| 摘要 |
PURPOSE: To improve the C/N ratio by containing the prescribed quantity of oxygen in the intermediate layer of the thickness of a magnetic film containing prescribed metallic elements. CONSTITUTION: A magnetic film to be vertically magnetized is formed on a substrate. The film contains the alloy of Tb, Co, Fe, and Cr and about 2 to 6% oxygen atoms are contained in the intermediate of the thickness of the film. The preferable concentration of metals in the film is 3 to 6% Cr atoms, 27 to 30% Tb atoms, 13 to 15% Co atoms, and 51 to 54% Fe atoms. In this case, three-pole sputtering is executed under pressure capable of generating metallic oxide. The existence of the oxide improves the magnetooptical characteristics of a thin film. In the case of forming the magneto-optical film, a SiOx (x = 1 or 2) layer, an alloy layer and an SiOx layer are successively formed and a reflection layer is formed on these layers.
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