| 摘要 |
The subject of the invention is an ellipsometer with phase modulation intended to determine the optical and vibrational structure of a sample, of the type comprising a light radiation source 1, a focusing device 2, 3, a polariser 6 and a photoacoustic phase modulator 7, which are arranged on the path of the incident wave, and an analyser 17, a focusing device 18, 19, 21, a grating monochromator 22, and a detection device 24, which are arranged on the path of the wave 13 reflected by the said sample 5. According to the invention, the light radiation source 1 suppies infrared radiation and the detection device 24 consists of two semi-conductor conductors, placed one behind the other, whose working spectral ranges are different. Application in particular to the study of densities of chemical bonds in thin films, in particular in the case of the production of hydrogenated amorphous silicon and derivatives. <IMAGE> |
