| 摘要 |
PURPOSE:To prevent wrinkling and to improve durability by specifying the incident direction of vapor deposition particle fluxes to a nonmagnetic substrate at the time of forming a magnetic layer at the beginning end of film formation and the terminating end of the film formation, respectively, on a substrate. CONSTITUTION:The incident direction of the vapor deposition particle fluxes to the nonmagnetic substrate 3 at the time of forming the recording layer inclines forward in the carrying direction of the substrate 3 from the direction normal to the surface of the substrate 3 and the angle of inclination thereof is >=60 deg. at the beginning end of the film formation on the substrate. Said direction inclines backward in the carrying direction of the substrate 3 from the direction normal to the surface of the substrate 3 and the angle of inclination thereof is <=45 deg. at the terminating end of the film formation. The deformation by the heat of the substrate 3 is therefore dispersed without being concentrated at one point. The wrinkling and the deterioration in the mechanical strength of the vapor deposited recording layer are thereby prevented.
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