| 摘要 |
PURPOSE:To accomplish economical, accurate and swift inspection and work by incorporating a working optical system which can radiate a laser beam for working to an inspected object by using a part of a common optical system. CONSTITUTION:A 2nd beam splitter 43 is arranged on a basic optical axis P1 between an objective lens 22 and a beam splitter 24 and a laser oscillator 41 which generates the laser beam for working is provided. The laser beam for working projected from the laser oscillator 41 is changed by the 2nd beam splitter 43 so that its direction becomes on the basic optical axis P1 and then it is radiated to the inspected object 4 through the objective lens 22. Since it does not pass the beam splitter 24, etc., which generates an optical axis P2 for direct observation the loss or power is not caused. Besides to that, a structure in which an indirect observation optical system can be easily provided can be obtained. Thus, the accurate and swift inspection and work can be possible. |
