REMOVAL OF SURFACE OXIDE FILM OF SUBSTRATE,申请号JP19870322688-传众专利搜索

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发明名称	REMOVAL OF SURFACE OXIDE FILM OF SUBSTRATE
摘要
申请公布号	JPH01165111(A)	申请公布日期	1989.06.29
申请号	JP19870322688	申请日期	1987.12.22
申请人	OMRON TATEISI ELECTRON CO	发明人	IMANAKA KOICHI
分类号	H01L21/203;H01L21/205;H01S5/00	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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