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发明名称	PLASMA ETCHING APPARATUS
摘要
申请公布号	JPS5845736(A)	申请公布日期	1983.03.17
申请号	JP19820150796	申请日期	1982.09.01
申请人	PERKIN ELMER CORP:THE	发明人	ARAN AARU RAINBAAGU;JIYOOJI ENU SUTAINBAAGU;CHIYAARUSU BII ZAROUIN
分类号	B01J19/08;C23F4/00;H01J37/32;H01L21/302;H01L21/3065	主分类号	B01J19/08
代理机构		代理人
主权项
地址

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