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发明名称
OPTOELEKTRONISCHE ANORDNUNG ZUM ZEILENWEISEN ABTASTEN VON EBENEN PRUEFLINGSOBERFLAECHEN
摘要
申请公布号
DD269443(A1)
申请公布日期
1989.06.28
申请号
DD19880312637
申请日期
1988.01.15
申请人
VEB CARL ZEISS JENA,DD
发明人
SENITZ,ECKARD,DD
分类号
G01N21/47;(IPC1-7):G01N21/47
主分类号
G01N21/47
代理机构
代理人
主权项
地址
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