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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH01164029(A)
申请公布日期
1989.06.28
申请号
JP19870323497
申请日期
1987.12.21
申请人
NEC CORP
发明人
KOSHIDA HARUTAKA
分类号
G03F7/20;H01L21/027;H01L21/30
主分类号
G03F7/20
代理机构
代理人
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地址
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