发明名称 |
METHOD FOR SYNTHESIZING DIAMOND PARTICLES |
摘要 |
PURPOSE:To continuously obtain diamond particles uniform in particle diameter with a simple device at high yield and at low cost by injecting gaseous powder incorporating diamond particles to thermal plasma jetted as a plasma jet and quenching the thermal plasma. CONSTITUTION:A DC plasma torch having a cathode 1 and an anode 2 is used and voltage is impressed between both electrodes 1, 2 while allowing discharge gas to flow and DC arc discharge is generated and arc plasma of >=5000 deg.C is generated and also a gaseous raw material consisting of H2 and CH4 which have fed to an arc plasma generating part from a discharge gas pipeline 5 provided on the anode 2 is heated and activated and jetted as high-velocity plasma jet 3. Then gaseous powder 4 incorporating fine diamond particles to be nucleus is injected to this jetted thermal plasma 3 through a powder filter 15 and allowed to collide against it and quenched and diamond is grown in a vapor phase on the surfaces of the fine diamond particles. Then diamond particles having been regulated to required size are sized with a size classifier 9 via a pump 8 and recovered in a powder collector 10. |
申请公布号 |
JPH01164795(A) |
申请公布日期 |
1989.06.28 |
申请号 |
JP19870320141 |
申请日期 |
1987.12.19 |
申请人 |
FUJITSU LTD |
发明人 |
KURIHARA KAZUAKI;SASAKI KENICHI;KAWARADA MOTONOBU;ETSUNO NAGAAKI |
分类号 |
C01B31/06;C30B29/04;H01L21/205 |
主分类号 |
C01B31/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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