| 摘要 |
PURPOSE:To obtain a sintered body of AlN having high heat conductivity in over the whole part without performing a treatment for removing the liquid phase after calcination by calcining a molded body of AlN admixed with a sintering aid while allowing the sintered AlN body to contact with another molded AlN contg. a less component for forming liquid phase than the first sintered AlN, or a molded AlN having a decreasing gradient of concn. of the liquid phase. CONSTITUTION:A molded body of AlN(A) admixed with a specified amt. of a sintering aid and having a larger content of portion for forming liquid phase is allowed to contact with a molded body(B) of AlN contg. less sintering aid and less portion for forming the liquid phase than the molded body(A). Both molded bodies(A, B) are calcined as they are held in contact. As the result, the liquid phase generated in the molded body(A) to be used as a target product migrates to the molded body(B). Thus, the content of the liquid phase is reduced in the sintered body of AlN has a target product, particularly, the product is formed in a purer state contg. less O2 as impurity. Thus, a sintered body of AlN having a high heat conductivity in over the whole part is obtd. without requiring a treatment for removing the liquid phase after calcination. |
