Automated photolithographic work cell.

摘要

Disclosed is an environmentally controlled work cell 200 including a robotic arm to transport semiconductor wafers one at a time between multi-level process stations within the work cell. The work cell receives a clean air supply from overhead air handlers which direct clean air 301 into the interior of the work cell, through the open top of the work cell 200. the overhead air handlers can be modular units which direct clean air only into the interior of the work cell 200, and, possibly, into the areas immediately surrounding the work cell. The overhead air handlers also can be large in extent, supplying clean air to most of the entire room in which the work cell is located.