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发明名称
INSPECTION APPARATUS
摘要
申请公布号
EP0259036(A3)
申请公布日期
1989.06.28
申请号
EP19870307157
申请日期
1987.08.13
申请人
SIRA LIMITED
发明人
WEST, ROBERT NOEL
分类号
G01J1/42;G01N21/89;(IPC1-7):G01J1/42;G01N21/88
主分类号
G01J1/42
代理机构
代理人
主权项
地址
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