| 摘要 |
PURPOSE:To improve the soft magnetic characteristics of an amorphous magnetic film formed on a substrate, by heat-treating the film in a magnetic field applied in a prescribed direction and by further heat treating the film while rotating the magnetic field in the film. CONSTITUTION:An amorphous magnetic film whose crystallization temp. is below the Curie temp. is formed on the surface of a substrate 3, the substrate 3 is mounted on a heater 1 in a container 4, and the container 4 is evacuated. A stationary magnetic field is applied to the film from magnets 5 placed at the outside of the container 4 in the direction perpendicular to the direction in which the magnetic permeability is measured, and the film is heated from room temp. to 300 deg.C in 30min with the heater 1 and held for about 15min. The magnets 5 are then rotated through a yoke 6, and while applying a rotating magnetic field to the film, the film is slowly cooled from 300 deg.C to room temp. in about 60min to improve the soft magnetic characteristics of the film. |
