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发明名称
SCREENING DEVICE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01163680(A)
申请公布日期
1989.06.27
申请号
JP19870324503
申请日期
1987.12.21
申请人
NEC CORP
发明人
SAITO AKITOSHI
分类号
H01L21/66;G01R31/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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