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经营范围
发明名称
FILM FORMATION
摘要
申请公布号
JPH01162773(A)
申请公布日期
1989.06.27
申请号
JP19870318761
申请日期
1987.12.18
申请人
MITSUBISHI HEAVY IND LTD
发明人
IKEDA TETSUYA;DANNO MINORU;MAKIHARA HIROSHI
分类号
C23C16/46;C23C16/50
主分类号
C23C16/46
代理机构
代理人
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