ELECTRON BEAM TEST PROBE SYSTEM FOR ANALYZING INTEGRATED CIRCUITS

摘要

ELECTRON BEAM TEST PROBE SYSTEM FOR ANALYZING INTEGRATED CIRCUITS An electron beam test probe system for analyzing the operation of an integrated circuit is described. It includes a circuit for generating a test signal pattern and coupling said test signal pattern to the integrated circuit under test. It also includes an electron beam test probe for making potential measurements at specified points on the surface of said integrated circuit. These potential measurements can be displayed as an image of the surface of said integrated circuit or as a graph of the potential at a specified point on the surface of said integrated circuit as a function of time for times chosen with respect to the test signal pattern. The points at which potential measurements are made may be specified with reference to a schematic diagram of the integrated circuit. The schematic diagram may be inputted to the present invention in a format which is consistent with that used by currently available circuit simulation programs. The points at which potential measurements are made may also be specified with reference to a specific location on said integrated circuit surface. The present invention includes storage for a layout drawing of the surface of the integrated circuit in a format which is consisted with that used in currently available mask design programs.