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发明名称
Magnetron cathode and method for sputter coating
摘要
申请公布号
US4842703(A)
申请公布日期
1989.06.27
申请号
US19880159318
申请日期
1988.02.23
申请人
EATON CORPORATION
发明人
CLASS, WALTER H.;SMITH, JAMES F.
分类号
C23C14/34;H01J37/34
主分类号
C23C14/34
代理机构
代理人
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地址
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