| 摘要 |
PURPOSE:To readily obtain carbon thin film with such excellent surface precision and strength as to be adequately put to practical use as a protective film for magnetic recording discs, by using a facing target-type sputtering means with the sputtering gas pressure at or below a specified level. CONSTITUTION:A voltage is applied on targets 3, 3 made of carbon, as the anode, arranged facing each other under a sputtering gas pressure of <=3.0m Torr to form a carbon thin film on the surface of a base plate 6 placed on the side of the magnetic field space 4 between said targets 3, 3. The sputtering gas is, e.g., argon or another inert gas. The sputtering gas pressure during sputtering operation has only to be set at <=3.0m Torr irrespective of the kind of the gas to be used. |
