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发明名称
SLIDE BOAT FOR LIQUID-PHASE EPITAXIAL GROWTH
摘要
申请公布号
JPH01160895(A)
申请公布日期
1989.06.23
申请号
JP19870319579
申请日期
1987.12.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
KOMINE YOSHIHARU;YASUMURA KENJI
分类号
C30B19/06;H01L21/208
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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