摘要 |
PURPOSE:To reduce the size of the title oxygen sensor and to improve its safety and to prolong its life by providing a couple of substrates, a diffusion hole, an internal chamber, etc. CONSTITUTION:At least one diffusion hole 12 which is formed in at least either of 1st and 2nd substrates 11 and 15 in its thickness direction determines the rate of oxygen which is supplied from a gas to be measured to the internal chamber 19 by diffusion. The substrate 11 which has the diffusion hole 12, therefore, functions as an oxygen ion conductor and a diffusion rate determining body. The substrate 15 which does not have the diffusion hole 12 functions only as an oxygen ion conductor. Further, 1st internal electrodes and external electrode 13a and 13b improve the efficiency of oxygen pumping by lengthening the substrate 11, electrodes 13a and 13b, and the three-phase interface of oxygen. Further, 2nd internal electrode and external electrode 16a and 16b also function as catalyst activating electrodes. The substrates 11 and 15, electrodes 13a and 13b, and 16a and 16b, and the three-phase interface to the oxygen can be lengthened, so the amount of oxygen pumped with a prescribed applied voltage can be doubled. |