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发明名称
摘要
申请公布号
DE3622517(C2)
申请公布日期
1989.06.22
申请号
DE19863622517
申请日期
1986.07.04
申请人
TOSHIBA CERAMICS CO., LTD., TOKIO/TOKYO, JP
发明人
TANAKA, TAKASHI;WATANABE, YOSHIYUKI, YAMAGATA, JP
分类号
C04B35/573;C04B41/52;C30B31/10;H01L21/22
主分类号
C04B35/573
代理机构
代理人
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