Acceleration-sensitive electronic component

摘要

An inertial body (8) is connected in a self-supporting manner via carrying beams (6) to a support frame (4) and is provided on one planar side surface (9) with an electrode (10). Opposite this electrode (10), an opposing electrode (22) is arranged on a base (20). In this way, acceleration-sensitive switching elements and also capacitive acceleration pickups may be realised. According to the invention, a plurality of mutually opposite carrying beams (6) are provided, which are arranged in such a way, that acceleration forces acting perpendicular to the opposing electrode (2) cause a linear movement of the inertial body (8). It is possible in this way to increase the surfaces of the electrode (10) and the opposing electrode (22) and therefore also the surface of the switching contact and the capacitance of the component. In a particularly preferred embodiment, the inertial body (8), the carrying beams (6) and the support frame (4) form a monolithic silicon body (2). Acceleration-sensitive switches, capacitive acceleration pickups. <IMAGE>