VAPOR DEPOSITION APPARATUS AND EVAPORATION SOURCE APPARATUS THEREOF, AND EVAPORATION OF RAW MATERIAL,申请号JP19880214753-传众专利搜索

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发明名称	VAPOR DEPOSITION APPARATUS AND EVAPORATION SOURCE APPARATUS THEREOF, AND EVAPORATION OF RAW MATERIAL
摘要
申请公布号	JPH01159370(A)	申请公布日期	1989.06.22
申请号	JP19880214753	申请日期	1988.08.29
申请人	BIJII INSTR GROUP LTD	发明人	GOODON DEBITSUTO ROOBISU
分类号	C23C14/24;C23C14/30	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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