| 摘要 |
PURPOSE:To obtain a durable and moisture resistant light receiving body having stable characteristics by laminating an a-Si layer contg. Ge or Sn and an a-Si layer contg. O, C or N on a support having a large number of hemispherical dents. CONSTITUTION:Rigid spheres are naturally dropped on the surface of a metallic support 101 to make the surface uneven by the traces of the spheres having >=0.035 ratio of D/R (D is <500mum width and R is curvature). An a-Si layer 102 contg. Ge or Sn is laminated on the support 101. When the layer 102 is formed as an electrically conductive layer and/or a conductivity controlling layer, 1X10<-1> 2X10<2>atom ppm Ge or Sn is distributed in the whole resion of the layer 102. When the concn. is made higher on the support 101 side, a layer inhibiting the implantation of electric charges is formed. A barrier layer of an electric insulator may be formed in place of the inhibiting layer or a multilayered structure consisting of both the layers may be provided. An a-Si layer 103 contg. uniformly distributed 0, C or N is laminated on the layer 102 so as to improve the durability and moisture resistance. The generation of interference fringes is prevented by the unevenness in an image forming process and an a-Si light receiving body 100 giving a high quality image is obtd. |
