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发明名称
SEMICONDUCTOR DEVICE AND ITS TESTING METHOD
摘要
申请公布号
JPH01158753(A)
申请公布日期
1989.06.21
申请号
JP19870318017
申请日期
1987.12.15
申请人
FUJITSU LTD
发明人
TAKESHIMA TORU
分类号
H01L21/82;H01L21/3205;H01L21/66;H01L23/52
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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