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经营范围
发明名称
WAFER PROBE
摘要
申请公布号
JPH01158745(A)
申请公布日期
1989.06.21
申请号
JP19870316321
申请日期
1987.12.16
申请人
FUJITSU LTD
发明人
NAGATOMO KAZUO;SHIGAKI MASAFUMI;KOIKE SHOICHI
分类号
G01R31/28;G01R1/073;G01R31/26;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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