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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01158778(A)
申请公布日期
1989.06.21
申请号
JP19870318018
申请日期
1987.12.15
申请人
FUJITSU LTD
发明人
KAWADA HARUO
分类号
H01L29/812;H01L21/338;H01L29/80
主分类号
H01L29/812
代理机构
代理人
主权项
地址
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