| 摘要 |
PURPOSE:To decrease the power consumption and to reduce mutual interference (crosstalk) by separating part of an optical waveguide substantially from a substrate and providing a heater for adjusting the length of an optical path finely on the separated optical waveguide. CONSTITUTION:Grooves 11a and 11b are formed in part of a clad layer 3 in the lengthwise direction of a core part and reach the silicon substrate. Part of the silicon substrate 1 is etched away so as to link the bottom parts of those grooves 11a and 11b, and thus a silicon substrate removal area 12 is formed to suppress heat conduction from the heated optical waveguide part 13 to the substrate 1. Namely, the thin film heater 4 as a heating body for adjusting the phase is loaded on the optical waveguide part 13 separated from the silicon substrate 1. The heating efficiency of the optical waveguide is improved. Consequently, the power consumption is made small and the mutual interference (crosstalk) is reduced. |
