| 摘要 |
PURPOSE:To easily etch a superconductor made of a ceramic superconducting material by using bromine or a bromine compd. as an etchant for the superconductor. CONSTITUTION:At least bromine or a bromine compd. is used as an etchant for a superconductor made of a ceramic superconducting material. By using the etchant, the superconductor in the form of a bulk (solid) material, a thin film or the like can be subjected to etching for patterning, cleaning or flattening. Etching technique adopted is not especially restricted and may be conventional known etching technique such as wet, gas, plasma or radical etching, RIE, RIBE or photoetching. |
