| 摘要 |
PURPOSE:To simplify a structure, to make an adjusting operation of a timing period unnecessary and to improve waste time by a method wherein a carrier positioning pin and a specimen stage are moved upward and downward at prescribed timing by using one vertical motion driving means. CONSTITUTION:When a specimen stage holder 5 is raised by a rotary motion of a cam 9, a pin holder 15 is also raised via a hooking member 16 by means of an energizing force of an energizing means 18; a carrier positioning pin 17 is first inserted into a positioning hole of a carrier 2; the pin holder 15 is brought into contact with a stopper 19, and its raising motion is stopped. After that, only the specimen stage holder 5 is raised a specimen 1 is lifted up from the carrier 2 by a specimen stage 4. When the specimen stage holder 5 is lowered from a state that the specimen stage 4 has been raised, only the speci men stage 4 places the lowered specimen 1 on the carrier 2; after that, the hooking member 16 is hooked at the specimen stage holder 5 and the pin holder 15; As the specimen stage holder 5 is lowered, the pin holder 15 is also lowered. By this setup, the carrier positioning pin 17 is pulled off from the positioning hole 2a of the carrier. |
