| 摘要 |
PURPOSE:To enable a device to be finely controlled, by controlling a linear motor according to the position, speed, and acceleration. CONSTITUTION:The input of present position signal from a position detector 16 together with target position signal from a setting unit 13 to a subtracter 17 is provided. The input of the present position signal to a differential unit 18 is also provided, and the input of differential-processed present speed signal together with target speed signal from a setting unit 14, to a subtractor 19 is provided. Besides, the present speed signal of output generated from the differential unit 18 is directed also to another differential unit 20 for input, and the input of differential-processed present acceleration signal together with target acceleration signal from a setting unit 15, to a subtractor 21 is provided. A position deviation value, a speed deviation value, and an acceleration deviation value obtained as a result are directed to a subtracter 25 for input, and are addition-processed, and are directed to the driving circuit 11 of a linear motor 12 to be inputted. |
