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发明名称
LOW-PRESSURE VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH01157516(A)
申请公布日期
1989.06.20
申请号
JP19870315668
申请日期
1987.12.14
申请人
NEC KYUSHU LTD
发明人
FUTSUKAICHI KEN
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
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地址
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