| 摘要 |
<p>PURPOSE:To improve the reliability entering laser light into a light-voltage transducing element through an optical waveguide which is formed on the surface of an insulating substrate and operates as one signal line. CONSTITUTION:The laser light 62 from a laser oscillator 47 enters the optical waveguide 49 of a lower glass substrate 31 from an optical waveguide pipe 46 through a diffusing lens 48 and is reflected by a light reflecting film 50 to illuminate a gate 51 through a reflection and transmission light hole 52. The light is converted into a voltage to apply a prescribed voltage to the drain electrode 59 of a transistor(TR) 32, which is turned on and off. Therefore, even if a pinhole is formed in the gate insulating film 53 of the gate 51, the short-circuit of a crossing semiconductor layer 54 and an optical path 49 through the gate 51 and film 53, and a row selection line (other signal line) which runs thereupon through a film 53 and operates electrically can be eliminated. Consequently, an interlayer short-circuit is eliminated and the reliability is improved.</p> |
