| 摘要 |
<p>PURPOSE:To improve the measuring accuracy without using a pressure controller by forming a measuring cell and a reference cell integrally through a soft film. CONSTITUTION:The inside of a rectangular parallelopiped-like box body 22 made of a plate having rigidity is divided into two parts by a diaphragm 23 having flexibility, and a cell device 21 consisting of a reference cell 25 and a measuring cell 27 is formed. In this state, gas whose concentration is to be measured is allowed to flow continuously into the measuring cell 27 by using a gas outflow port 33. Subsequently, gas whose concentration is known is enclosed into the reference cell 25. Next, infrared rays passing through infrared transmission windows 28-31 are received by photodetectors 5, 6, and by executing the comparing operation, gas concentration is calculated. In such a way, even if a pressure fluctuation is generated in measured gas, and even if an environmental temperature is varied, since the diaphragm 23 is deformed (X1, X2), the internal pressure of the measuring cell and the internal pressure of the reference cell are balanced and become equal, therefore, even if a pressure controller does not exist, the measuring accuracy is improved.</p> |
