摘要 |
PURPOSE:To obtain controlling equipment capable of directly controlling the peak value of a pulse laser output, by converging a laser light for detection into an integrating sphere, and comparing the detected laser output and the reference value of a peak output of pulse laser. CONSTITUTION:A laser light detecting equipment 8 is provided with an integrating sphere having a spherical surface body whose inner surface is uniformly coated with gold, on a part of which a detection end having a detecting part composed of Cd, Hg and Te is arranged. By this integrating sphere a very small laser output signal is detected. Usually, a response speed of 10mus is sufficiently attained for the rise time of pulse. A difference signal (DELTAPo-DELTAPf) between a wave form signal DELTAPf of pulse laser and a peak ordering signal DELTAPo of pulse laser is amplified by a controlling equipment 10, which serves as a controlling signal to control the supply power of a discharge power supplying equipment 7 so as to increase or decrease it. In this manner, the peak value of a pulse laser output is directly detected, and the laser output is controlled so as to be constant, so that a pulse laser processing of high accuracy is possible in a welding process, etc. |