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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01157571(A)
申请公布日期
1989.06.20
申请号
JP19880291521
申请日期
1988.11.18
申请人
SEIKO EPSON CORP
发明人
KONDO TOSHIHIKO
分类号
H01L23/522;H01L21/28;H01L21/336;H01L21/768;H01L21/8234;H01L27/08;H01L27/088;H01L29/78
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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