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发明名称
SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPH01154512(A)
申请公布日期
1989.06.16
申请号
JP19870311916
申请日期
1987.12.11
申请人
HITACHI LTD
发明人
FUJISAKI YOSHIHISA;TAKANO YUKIO;MIYAO MASANOBU
分类号
H01L21/203;H01L21/20;H01L21/84
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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