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经营范围
发明名称
CHEMISCHER REAKTOR FUER VLSI.
摘要
申请公布号
AT44117(T)
申请公布日期
1989.06.15
申请号
AT19850109202T
申请日期
1985.07.23
申请人
J.T. BAKER INC.
发明人
CADY, WAYNE A.
分类号
H01L21/306;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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