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发明名称
FORMATION OF MULTILAYER WIRING
摘要
申请公布号
JPH01152651(A)
申请公布日期
1989.06.15
申请号
JP19870309721
申请日期
1987.12.09
申请人
OKI ELECTRIC IND CO LTD
发明人
NAKAMURA HIROKI
分类号
H01L21/3213;H01L21/31;H01L21/768
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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