| 摘要 |
PURPOSE:To improve cooling efficiency, and to miniaturize the whole device by doubling an air channel section and using an air channel on the outside as a gas intake. CONSTITUTION:An air channel 10 is formed in double structure on the upstream side of main discharge electrodes 2, 3, and an air-supply duct 13 as the extension of an air-supply pipe 1b is installed to the double structure section of the air channel 10. Consequently, the upper sections of the surfaces of the main discharge electrodes 2, 3 can be exposed to a novel gas taken in from an air supply system at all times. Accordingly, the cooling efficiency of the main electrodes is also improved, and the discharge electrodes 2, 3 important as the conditions of glow discharge and the state near the discharge electrodes 2, 3 can be kept more constant than conventional devices. |
