METHOD OF ETCHING,申请号JP19870311330-传众专利搜索

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发明名称	METHOD OF ETCHING
摘要
申请公布号	JPH01152626(A)	申请公布日期	1989.06.15
申请号	JP19870311330	申请日期	1987.12.09
申请人	SANYO ELECTRIC CO LTD	发明人	NAKANO HARUO
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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